Atomic Layer Infiltration and Deposition for Functional Hybrid Materials 

2023 Workshop

Workshop Schedule

Sunday, 10.9.23


The tutorial are intended for newcomers to the field and will provide basic background.


11:30 – 12:00Tutorial registration & light lunch
Tutorial chair: Eran Edri, Ben-Gurion University
12:00 – 13:15Basics of vapor-phase materials deposition and introduction to atomic layer deposition | Chang Yong Nam, Brookhaven National Laboratory
13:15 – 13:45Coffee break
13:45 – 15:00Evolution of Vapor Phase Processing (VPI) as the fourth pillar of Atomic Layer Processing | Mato Knez, CIC nanoGUNE
15:00 – 15:15Coffee break
15:15 – 16:30Atomic and Molecular Layer Deposition on Particulate Materials | Malachi Noked, Bar Ilan University


Workshop opening

18:30Reception dinner

Monday, 11.9.23

Fundamentals of Materials Hybridization via VPI, SIS, ALD, and MLD


08:30 – 09:15Gathering + coffee
09:15 – 09:30Opening remarks | Tamar Segal-Peretz, Technion – Israel Institute of Technology
Session chair: Tamar Segal-Peretz, Technion – Israel Institute of Technology
09:30 – 10:00Lessons From Nature: How to Get the Best out of Materials (Invited) | Mato Knez, CIC nanoGUNE
10:00 – 10:30On the Development and Atomic Structure of ZnO Nanoparticles Grown within Polymers using Sequential Infiltration Synthesis | Inbal Weisbord, Technion – Israel Institute of Technology
10:15 – 10:30Understanding the Chemical Structure of PIM-1/Metal Oxide Hybrid Membranes Synthesized via Vapor Phase Infiltration to Achieve New Properties | Benjamin Jean, Georgia Institute of Technology
10:30– 10:45Sequential Infiltration Synthesis of Al2O3 in Bio-Based Polymers: A Physico-Chemical Investigation | Alessia Motta, CNR-IMM
10:45 – 11:15Coffee break
Session chair: Michele Perego, CNR-IMM
11:15 – 11:45Sequential Infiltration at Its Earliest Stages: Cluster Structure, Coalescence, and Conductivity (Invited) | Alex Martinson, Argonne National Laboratory
11:45 – 12:00Imaging the Bulk Heterojunction Morphology in Organic Solar Cells Using VPI Selective Staining | Sasha Simotko, Technion – Israel Institute of Technology
12:00 – 12:30Poster flash talks
12:30-12:40Group Photo
12:40 – 14:00Lunch
14:00 – 15:00Poster session
Session chair: Gabriele Seguini, CNR-IMM
15:00 – 15:30Unravelling Process Chemistries at the Atomic Level: Simulation of Molecular Layer Deposition and Vapour Phase Infiltration (Invited) | Michael Nolan, University College Cork
15:30 – 15:45Molecular Layer Deposition of Alucone Thin Film on LiCoO₂ to Enable High Voltage Operation | Ortal Shalev, Bar-Ilan University
15:45 – 16:00Vapor Phase Deposition of Chiral Thin Films by Atomic and Molecular Layer Deposition Showing Spin Selective Transport | Salma Khalde, Hebrew University of Jerusalem
16:00 – 16:30Coffee break
16:30 – 18:00Cable car to the University of Haifa and a lookout on the Haifa Bay


Tuesday, 12.9.23

Functional Properties and Applications


08:30 – 09:00Gathering + coffee
Session chair: Chang-Yong Nam, Brookhaven National Laboratory
09:00 – 09:30Free and Simple Simulations of Vapor-Phase Infiltration Process Kinetics Using Google Colab (Invited) | Mark Losego, Georgia Institute of Technology
09:30 – 09:45Biomimetic Selectively Antibacterial and Biocompatible Metallochitin Films by Vapor Phase Chemistry | Karina Ashurbekova, CIC nanoGUNE
09:45 – 10:00The Effect of Water Uptake on the Mechanical Behavior of Hybrid Thin Films Fabricated by Sequential Infiltration Synthesis | Shachar Keren, Technion – Israel Institute of Technology
10:00 – 10:30Hybrid Functional Materials by Atomic and Molecular Layer Deposition - Chemistry and Selected Applications (Invited) | Roie Yerushalmi, Hebrew University of Jerusalem
10:30 – 11:00Coffee break
Session chair: Eran Edri, Ben-Gurion University
11:00 – 11:30Chemical Vapor Functionalization of Polymer Membranes for Water Treatment (Invited) | Jeffrey Elam, Argonne National Laboratory
11:30 – 11:45Modification of Reverse Osmosis Membranes with Phosphate-Sorbed Alucone to Mitigate Ozone Damage | Leilah Krounbi, Ben Gurion University
11:45 – 12:00Multifunctional Textiles upon Vapor Phase Infiltration (VPI) of Metal Oxides into Denim Jeans | Natalia Chamorro Garcia, CIC nanoGUNE
12:00 – 13:00Lunch
13:00 – 13:30Tour to Technion Energy Program Labs
13:30 – 14:00Poster session
Session chair: Tamar Segal-Peretz, Technion – Israel Institute of Technology
14:00 – 14:30Application of Vapor-Phase Infiltration for Energy-Efficient, Extremely Downscaled Semiconductor Devices (Invited) | Chang-Yong Nam, Brookhaven National laboratory
14:30 – 14:45 Rational Design and Fabrication of Block Copolymer Templated Hafnium Oxide Nanostructure | Ruoke Cai, Technion – Israel Institute of Technology
14:45 - 15:00Hybrid Metrology for Infiltrated Optical Metasurfaces | Irdi Murataj, Istituto Nazionale di Ricerca Metrologica (INRiM)
15:00 – 20:00Social activity - tour to old Acre & dinner


Wednesday, 13.9.23

Molecular Understanding and Macroscopic Behaviors


08:30 – 09:00Gathering + coffee
Session chair: Gabriele Seguini, CNR-IMM
09:00 – 09:30Fundamental Physical and Chemical Phenomena Occurring during Sequential Infiltration Synthesis: In-Situ Real Time Monitoring by Spectroscopic Ellipsometry (Invited) | Michele Perego, CNR-IMM
09:30 – 09:45Enantioselective Photocatalysis: A Novel Method for Enantiomeric Enrichment via Chiral Imprinting and Activity Damping Using ALD | Nitai Arbell, Technion – Israel Institute of Technology
09:45 – 10:15Sequential Infiltration Synthesis of Ru metal and RuO2 (Invited) | Jolien Dendooven, Ghent University
10:15 – 10:45Coffee break
Session chair: Michele Perego, CNR-IMM
10:45 – 11:15In-Situ MCP-Calorimetry Probe for ALD and its Derivative Process such as ALE/MLD/SIS (Invited) | Anil Mane, Argonne National Laboratory
11:15 – 11:30Next Generation Complex Ceramic Nanowires Fabrication | Rotem Azoulay, Technion – Israel Institute of Technology
11:30 – 11:45Organic-Inorganic Hybrid Thermoelectric Materials through a New Concept of Vapor Phase Infiltration | Kristina Ashurbekova, CIC nanoGUNE
11:45-12:00Universal platform for photothermal-induced substrate’s temperature influence in sequential infiltration synthesis of a block copolymer template | Przemyslaw Pula, University of Warsaw
12:00 – 13:30Lunch
Session chair: Chang-Yong Nam, Brookhaven National Laboratory
13:30 – 14:00Suppression of Electrode Material Degradation by Surface Modifications Techniques (Invited) | Malachi Noked, Bar-Ilan University
14:00 – 14:15Cost-Effective High-Energy LiNiO₂-Based All-Solid-State Lithium Batteries Enabled by Ultrathin Atomic Layer Deposition Protection | Longlong Wang, University of Oxford
14:15 – 14:30Improved Electrochemical Performance of TiO2 Coated NVPFO2x(0<x<1): Synergistic Effect of 3rd Na Activation and Artificial CEI Layer Formation by ALD Method | Sankalpita Chakrabarty, Bar Ilan University
14:30 – 15:00Coffee break
Session chair: Eran Edri, Ben-Gurion University
15:00 – 15:15Optimizing Accessibility in Ultra-High Ratio Carbon Sponges | Lev Rovinsky, Tel Aviv University
15:15 – 15:30Multicomponent RuAlOx and RuTiOx Thin Films through Atomic Layer Modulation | Ngoc Le Trinh, Chi Thang Nguyen, Bonwook Gu, Byungchan Lee, Sehee Kim, Yeseul Son, Taehoon Cheon, Bonggeun Shong, Soo-Hyun Kim, Han-Bo-Ram Lee, Incheon National University
15:30 – 16:00Closing remarks and poster awards



1Alloy Nanowire Arrays with Controlled Compositions Templated by Block Copolymers | Ofer Burg, Hebrew University of Jerusalem
2Photocatalytic Enantiomeric Enrichment of Racemic Drug Mixtures using ALD-Assisted Chiral Molecular Imprinting | Lital Felzenshtein, Technion – Israel Institute of Technology
3Protective Thin Film Coating by ALD to Enhance Corrosion Resistivity of Current Collectors in Rechargeable Magnesium Batteries | Ananya Maddegalla, Bar-Ilan University
4Modifying the Properties and Performance of Biodegradable Polymers with Atomic Layer Deposition | Gil Menasherov, Technion – Israel Institute of Technology
5High Entropy: An Emerging Prospect for Design of Na-Ion Battery Cathode | Akanksha Joshi, Bar-Ilan University
6How Low Can We go? Enhancing Polymer Films Resistance to Solvents with SIS by Modifying the Concentrations of the Reactive Functional Groups | Gilad Sasson, Technion – Israel Institute of Technology
7Applications with Bio-Based Green Material using Vapor Phase Infiltration | Seiji Morita, Wisdom Pool Research Institute G.K.
8Binder-free tandem MLD/ALD treated Si-Ti layered oxides thin films on CNT mat for Flexible and Ultra-Stable Pseudocapacitor | Ankit Yadav, Hebrew University of Jerusalem
9Atomic Layer Deposition of AlF₃-ZrO₂ on Ni-Rich LiNi₀.₈Co₀.₁Mn₀.₁O₂ Cathode for Improved Electrochemical Performance in Lithium-Ion Batteries | Bagavathi Muniyandi, Bar Ilan University
10Sequential Infiltration Synthesis for Organized Nanostructure Fabrication | Gabriele Seguini, IMM-CNR


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